Item	Transmittance (%)
	193nm	248nm	365nm
Perfluoropolymer	Perfltuoropolymer
Thickness	0.28㎛
Transmittance	≥ 99.0% (at 193nm), ≥ 99.0% (at 248nm), ≥ 99.0% (at 365nm)
Uniformity of TR	≤ 0.1%
Transmittance Spectrum

Item	Transmittance (%)
	193nm	248nm	365nm
Material	Perfluoropolymer
Thickness	0.84㎛
Transmittance	≥ 99.0% (at 193nm)
Uniformity of TR	≤ 0.3%
Transmittance Spectrum

Item	Transmittance (%)
	193nm	248nm	365nm
Material	Perfluoropolymer
Thickness	0.82㎛
Transmittance	≥ 99.0% (at 248nm) ≥ 99.0% (at 365nm)
Uniformity of TR	≤ 0.4%
Transmittance Spectrum

Item	Transmittance (%)
	248nm	365nm	436nm
Material	Cellulose & Perfluoropolymer
Thickness	1.44㎛
Transmittance	≥ 99.0% (at 365nm), ≥ 99.0% (at 436nm)
Uniformity of TR	≤ 0.5%
Transmittance Spectrum