Scrubber

  • Plasma-Wet Scrubber
  • Dry Scrubber
  • Burn-Wet Scrubber
  • Heat-Wet Scrubber
Plasma-Wet Scrubber
  • Plasma-Wet Scrubber
  • Dry Scrubber
  • Burn-Wet Scrubber
  • Heat-Wet Scrubber
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Plasma-Wet Scrubber

FINE600PE, FINE600PE_Dual


Capacity

600 slm

Inlet port

4 / 6 port

Process application

All processes including PFCs gas

Key Feature

Toxic/acidic gas decomposition using ultra-high temperature “10,000K Plasma Arc”
(PFCs decomposition)

Wet scrubbing

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Safety

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detecting

External cooling of the chamber using PCW

Water leak detection function

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Dry Scrubber

FINE100CS, FINE100CE, FINE100CE_Dual, FINE1000CS
FINE200CS, FINE200CE, FINE200CE_Dual


Capacity

FINE100 series : 100 slm

FINE200 series : 200 slm

FINE1000CS : 50,000 slm

Inlet port

1 port

Process application

Ion Implantation, Plasma Etch, ALD, CVD, Photovoltaics, MOCVD

Key Feature

Toxic gas removal based on physicochemical reation (within TLV)

Core technology of Dry SCR’ = “RESIN”

High efficiency & lifetime of RESIN (Depend on Process)

Safety

Powder control function

Automation system through PLC control

Auto By-pass function (Application of Mini-Absorber)

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Burn-Wet Scrubber

FINE600BE, FINE600BE_Dual


Capacity

600 slm

Inlet port

4 / 6 port

Process application

Some PFCs gas can be removed (NF3)

CVD, Diffusion, etc.

Key Feature

Toxic gas decomposition using high heat and strong energy (radicals) through LNG (CH4)
“Combustion reaction”

Wet scrubbing

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Safety

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detecting

External cooling of the chamber using PCW

Water leak detection function

LNG (CH4) detection function

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Heat-Wet Scrubber

FINE600HS, FINE600HS_Dual


Capacity

600 slm

Inlet port

4 / 6 port

Process application

CVD, LPCVD, Diffusion, etc.

Key Feature

Gas removal through thermal decomposition and oxidation using a high-temperature heater

Wet scrubbing

Water soluble gas removal using Wet zone

Exhaust gas cooling function using Wet zone

Safety

Powder control function

Automation system through PLC control

Auto By-pass function

Fire detecting through smoke detection

External cooling of the chamber using PCW

Water leak detection function

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